A NEW SI-SURFACE MICROMACHINED GYROSCOPE FOR AUTOMOTIVE NAVIGATION

The challenge of today's development of angular rate sensors (gyroscopes) is to reduce size and cost in order to open up new fields of applications. One important application is automotive positioning and navigation. The development of this emerging market has been moderate in the last years. Now with the availability of highly sophisticated digital maps the market penetration is expected to ramp up significantly in the near future. To increase the share of automotive navigation and positioning in all classes of passenger cars highly integrated systems and thus components with low size and low cost are required. At Robert Bosch GmbH in Reutlingen a gyroscope based upon silicon surface micromachining is currently under development. The major development target is to achieve a sensor with a standardized small sized packaging for use in automotive navigation systems as well as for rollover sensing systems. The sensing element uses the Coriolis effect. It is a highly symmetric rotational oscillator that is capacitive actuation. The Coriolis force is detected capacitively as well. The sensing axis is in-plane of the SMD packaging PLCC44. The paper describes the general concept of the sensor, outlines the used process and explains main design considerations. (A) For the covering abstract see ITRD E106484.

• Corporate Authors:

  EMPHATIC VENTURES

  43 SHERIFOOT LANE
  SUTTON COLDFIELD, BIRMINGHAM,   United Kingdom  B75 5DU
• Authors:
  • ALT, S
  • Lang, M
  • Offenberg, M
  • ULLMANN, D
• Conference:
  • TELEMATICS AUTOMOTIVE 2000, HELD 11-13 APRIL 2000, BIRMINGHAM, UK. VOLUME 2: SESSIONS 5-8: TRAFFIC MANAGEMENT, EMERGING TECHNOLOGIES, NAVIGATION AND COMPUTING, TELEMETRY AND CONTROL SYSTEMS
• Publication Date: 2000

Language

• English

Media Info

• Features: References;
• Pagination: p. 6/8-6/15

Subject/Index Terms

• TRT Terms: Digital computers; Information processing; Mathematical models; Route guidance; Sensors; Silicon
• ITRD Terms: 8655: Data processing; 8673: Digital computer; 6473: Mathematical model; 8771: Route guidance; 6120: Sensor; 7148: Silicon
• Subject Areas: Data and Information Technology;

Filing Info

• Accession Number: 00801621
• Record Type: Publication
• Source Agency: Transport Research Laboratory
• Files: ITRD
• Created Date: Nov 8 2000 12:00AM