PHOTOGRAMMETRIC SELF-CALIBRATION OF SCANNING ELECTRON MICROSCOPES

There is a demand from throughout the scientific community for extremely accurate three-dimensional (3D) angle and distance measurements from SEM micrographs. Photogrammetric self-calibration can be used to mathematically model systematic SEM distortions, which amount to many hundreds of micrometers at photo scale, so that a 10- to 100-times improvement over conventional methods can be realized in the accuracy of SEM 3D measurements. Photogrammetric self-calibration also provides the microscopist with his first means for determining the true accuracy of his 3D measurements. The highly significant spiral distortion, resulting from nonlinear electron scanning, is believed to apply as well to airborne sensors which rely upon scanning techniques.

  • Availability:
  • Corporate Authors:

    American Society of Photogrammetry

    105 North Virginia Avenue
    Falls Church, VA  USA  22046
  • Authors:
    • Maune, D F
  • Publication Date: 1976-9

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Filing Info

  • Accession Number: 00142585
  • Record Type: Publication
  • Files: TRIS
  • Created Date: Dec 15 1976 12:00AM