Silicon Pressure Sensors are discussed in the context of their information translation role. The technology's capabilities in bridging the gap between typical measured phenomena and their associated control systems are explored. A "theory of operation" overview reviews the silicon diaphragm's mechanical characteristics, piezoresistance, and compensation circuit design. Other sections deal with the manufacturing sequence and probable fiture product modifications. A summary evaluates the design's qualities in terms of fourteen weighting factors. /GMRL/

Media Info

  • Pagination: 23 p.

Subject/Index Terms

Filing Info

  • Accession Number: 00145231
  • Record Type: Publication
  • Report/Paper Numbers: SAE 760094
  • Files: TRIS
  • Created Date: May 31 1977 12:00AM