THE CHARACTERISTICS AND APPLICATIONS OF THE SCANNING MICROSCOPE

THE SCANNING ELECTRON MICROSCOPE (SEM) IS A COMPARATIVELY NEW INSTRUMENT, QUITE DIFFERNET IN PRINCIPLE AND APPLICATION FROM THE CONVENTIONAL TRANSMISSION ELECTRON MICROSCOPE (TEM), AND HAS BEEN COMMERCIALLY AVAILABLE FOR ONLY THE PAST FEW YEARS. THE SCANNING ELECTRON MISROSCOPE PROVIDES INFORMATION ON THE TOPOGRAPHY, COMPOSITION, AND ELECTRICAL BEHAVIOR OF A VARIETY OF SOLID SAMPLES, AND DENSITY INFORMATION ON THIN SECTIONS. IN PRESENTLY AVAILABLE INSTRUMENTS, THE RESOLUTION OF ABOUT 200 A, COMBINED WITH GREAT DEPTH OF FIELD, IS FAVORABLY COMPARABLE TO REPLICA TECHNIQUES, AND THE SCANNING ELECTRON MICROSCOPE AVOIDS THE PROBLEMS OF SPECIMEN DAMAGE OR THE INTRODUCTION OF ARTIFACTS. IN ADDITION, IT PERMITS THE EXAMINATION OF MANY SAMPLES THAT CANNOT BE REPLICATED, AND PROVIDES A BROADER RANGE OF INFORMATION. THE SCANNING ELECTRON MICROSCOPE HAS FOUND APPLICATION IN DIVERSE FIELDS OF STUDY, INCLUDING BIOLOGY, MATERIALS SCIENCE, SEMICONDUCTOR TECHNOLOGY AND MANY OTHERS. /AUTHOR/

• Supplemental Notes:
  • Vol 9, No 1, PP 8-16
• Authors:
  • Kimoto, S
  • Russ, J C
• Publication Date: 1960-10

Media Info

• Serial:
  • Materials Research and Standards
  • Publisher: American Society for Testing and Materials (ASTM)

Subject/Index Terms

• TRT Terms: Biology; Electron microscopes; Materials; Scanners; Semiconductors
• Uncontrolled Terms: Resolution
• Old TRIS Terms: Scanning
• Subject Areas: Geotechnology; Highways; Materials;

Filing Info

• Accession Number: 00216787
• Record Type: Publication
• Files: TRIS
• Created Date: Aug 17 1994 12:00AM