PHOTOGRAMMETRIC SELF-CALIBRATION OF SCANNING ELECTRON MICROSCOPES

There is a demand from throughout the scientific community for extremely accurate three-dimensional (3D) angle and distance measurements from SEM micrographs. Photogrammetric self-calibration can be used to mathematically model systematic SEM distortions, which amount to many hundreds of micrometers at photo scale, so that a 10- to 100-times improvement over conventional methods can be realized in the accuracy of SEM 3D measurements. Photogrammetric self-calibration also provides the microscopist with his first means for determining the true accuracy of his 3D measurements. The highly significant spiral distortion, resulting from nonlinear electron scanning, is believed to apply as well to airborne sensors which rely upon scanning techniques.

• Availability:
  • Find a library where document is available. Order URL: http://worldcat.org/issn/00991112
• Corporate Authors:

  American Society of Photogrammetry

  105 North Virginia Avenue
  Falls Church, VA  United States  22046
• Authors:
  • Maune, D F
• Publication Date: 1976-9

Media Info

• Features: Figures; References; Tables;
• Pagination: p. 1161-72
• Serial:
  • Photogrammetric Engineering and Remote Sensing
  • Volume: 42
  • Issue Number: 9
  • Publisher: American Society for Photogrammetry and Remote Sensing
  • ISSN: 0099-1112

Subject/Index Terms

• TRT Terms: Aerial surveying; Calibration; Distortion (Optics); Electron microscopes; Mathematical models; Spirals
• Old TRIS Terms: Distortion /optical/
• Subject Areas: Design; Highways;

Filing Info

• Accession Number: 00142585
• Record Type: Publication
• Files: TRIS
• Created Date: Dec 15 1976 12:00AM