AUTOMOTIVE SEMICONDUCTOR PRESSURE SENSORS

Silicon Pressure Sensors are discussed in the context of their information translation role. The technology's capabilities in bridging the gap between typical measured phenomena and their associated control systems are explored. A "theory of operation" overview reviews the silicon diaphragm's mechanical characteristics, piezoresistance, and compensation circuit design. Other sections deal with the manufacturing sequence and probable fiture product modifications. A summary evaluates the design's qualities in terms of fourteen weighting factors. /GMRL/

• Corporate Authors:

  Society of Automotive Engineers (SAE)

  400 Commonwealth Drive
  Warrendale, PA  United States  15096
• Authors:
  • Hood, R B
• Publication Date: 1976-2

Media Info

• Pagination: 23 p.

Subject/Index Terms

• TRT Terms: Control systems; Electric circuits; Manufacturing; Pressure gages; Semiconductors; Silicon
• Old TRIS Terms: Circuits; Pressure sensors
• Subject Areas: Highways; Safety and Human Factors;

Filing Info

• Accession Number: 00145231
• Record Type: Publication
• Report/Paper Numbers: SAE 760094
• Files: TRIS
• Created Date: May 31 1977 12:00AM