THE APPLICATION OF LIGA MICROENGINEERING TECHNOLOGY TO AUTOMOTIVE SENSORS

Automotive manufacturers world wide have turned to advanced electronics technology to answer demands for improved safety, greater vehicle performance and reduced environmental impact. As part of this trend, the number of on-car sensors has increased dramatically. With such large numbers being used on a single vehicle there is considerable pressure on sensor designers and manufacturers to make them as small, light and cheap as possible. This paper describes the development of a new class of microsensor suitable for the automotive market, to be manufactured using an emergent technology known as LIGA, a process uniquely capable of the mass-production of three-dimensional microstructures of comparatively great structural height, opening up prospects for the economic manufacture of very much more sophisticated automotive microsensors than has hitherto been possible. (A) For the covering abstract see IRRD 887751.

Language

  • English

Media Info

  • Features: References;
  • Pagination: p. 209-18

Subject/Index Terms

Filing Info

  • Accession Number: 00737247
  • Record Type: Publication
  • Source Agency: Transport Research Laboratory
  • ISBN: 0-471-96726-2
  • Files: ITRD
  • Created Date: Jun 27 1997 12:00AM