Off-Grid MEMS Sensors Configurations for Transportation Applications

The motivation for this report is a proposed new microelectromechanical systems (MEMS) sensor with applications in civil infrastructure sensing. The work required was to determine accurate estimates of the resonant frequencies for a fixed-fixed silicon bridge within the device so that further testing and development could proceed. Additional knowledge and information were essential, though, before these requested calculations could be performed confidently. First, a thorough review of current structural health monitoring concepts and methods was performed to better understand the field in which this device would be applied and what incentive existed to develop a new sensor. Second, an in-depth investigation of vibrational beam mechanics theories was completed to ensure the accuracy of the frequency results for the new MEMS sensor. This report analyzed the influence of three assumptions employed in the Euler-Bernoulli, Rayleigh, and Timoshenko beam theories by comparing their results to a three-dimensional, elasticity-based approximation for vibrational frequencies and mode shapes. The results of this report showed that all three theories are insufficient when a fixed support is involved, so the elasticity-based approximation was utilized to calculate the frequencies for the bridge component in the MEMS device. These results have been passed on to the developers so that the testing process could move forward in the hopes that the device could advance the field of structural health monitoring in the future.


  • English

Media Info

  • Media Type: Digital/other
  • Features: Figures; References; Tables;
  • Pagination: 90p

Subject/Index Terms

Filing Info

  • Accession Number: 01499673
  • Record Type: Publication
  • Report/Paper Numbers: MPC-13-257
  • Contract Numbers: MPC Project #341
  • Created Date: Nov 21 2013 9:22AM