HOW TO USE AN ELECTRON BEAM GUN

THE ELECTRON BEAM GUN IS RAPIDLY BECOMING THE WORK HORSE OF THE THIN FILM INDUSTRY. ELECTRON BEAM GUNS ARE NOT NEW. THEY HAVE BEEN USED FOR EVAPORATION FOR ABOUT TWELVE YEARS. THE FIRST GUNS USED PIERCE OPTICS AND WERE COMPLEX IN-LINE AFFAIRS MOUNTED IN THE TOP OF THE VACUUM CHAMBER. ABOUT SIX YEARS AGO, THE FIRST 180 DEGREE BENT-BEAM SELF-ACCELERATED GUNS WERE INTRODUCED. ELECTRON BEAM GUNS OFFER THE USER A GREAT DEAL. THE ONLY PRICE THEY EXTRACT IS THE COMPARATIVELY HIGH CAPITAL OUTLAY. MATERIALS THAT CAN BE EVAPORATED, AND MOST CAN, WILL ALWAYS DEPOSIT FASTER AND WITH PURER FILMS FROM AN ELECTRON BEAM GUN THAN BY ANY OTHER METHOD. THE SIMPLICITY IN SHIFTING ELECTRON BEAM GUNS FROM ONE PROCESS TO ANOTHER MAKES THEM ONE OF THE MOST VERSATILE OF THE THIN FILM TOOLS. /AUTHOR/

• Availability:
  • Find a library where document is available. Order URL: http://worldcat.org/issn/07469179
• Supplemental Notes:
  • Vol 20, No 11, PP 58-60
• Authors:
  • Graper, E B
• Publication Date: 1969-11

Media Info

• Serial:
  • Research & Development
  • ISSN: 0746-9179

Subject/Index Terms

• TRT Terms: Costs; Electron beams; Electrons; Evaporation; Guns; Materials; Thin films
• Old TRIS Terms: Electron guns
• Subject Areas: Finance; Geotechnology; Highways; Materials; Security and Emergencies;

Filing Info

• Accession Number: 00216913
• Record Type: Publication
• Files: TRIS
• Created Date: Feb 16 1970 12:00AM